CX-PRN11 Voltage Pirani composite vacuum transmission gauge

RN11 is composed of differential pressure MEMS piezoelectric sensor and Pirani sensor. Thetwo sensors realize seamless transition in measurement. It has integrated electronic control.circuit, digital communication system, analog voltage output and two setting points as process control. Continuous vacuum process equipment typically uses a vacuum lock as the interface for continuously evacuating the main chamber.

When the vacuum lock is at atmospheric pressure or high vacuum, a separate actuator is required to indicate the opening direction of the indicator valve.

The PRN11 combines the advantages of MEMS piezoelectric and Pirani to form an integrated, compact component that achieves high-precision, fast-response, high-repetition pressure measurement of atmospheric pressure accessories, and a wide range of atmospheric pressures up to 0.001 Pa. The vacuum lock controls the pressure sensor.

Characteristic

Piezoelectric differential pressure unit and Pirani composite wide range.

 Built-in temperature compensation, high precision

Dual control point setting switch

One-button atmosphere/vacuum calibration

Voltage analog output

 Support RS485 communication Modbus-RTU protocol